====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     2.E+04 A   Layer # 1- Density = 6.406E22 atoms/cm3 = 10.20 g/cm3
  Layer # 1- Mo = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1001.00
 Ion Average Range =   118.8E+02 A   Straggling =   241.7E+01 A
 Ion Lateral Range =   246.0E+01 A   Straggling =   306.3E+01 A
 Ion Radial  Range =   375.3E+01 A   Straggling =   193.9E+01 A
====================================================================
 Range Skewne- = -000.9810  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.4101  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Mo    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
200010.E-03  0.0000E+00  1.8648E+07
400010.E-03  0.0000E+00  2.7228E+07
600010.E-03  0.0000E+00  2.7428E+07
800010.E-03  0.0000E+00  2.5130E+07
100001.E-02  0.0000E+00  2.4403E+07
120001.E-02  0.0000E+00  2.5443E+07
140001.E-02  4.9950E+02  2.8177E+07
160001.E-02  0.0000E+00  2.8343E+07
180001.E-02  0.0000E+00  2.7553E+07
200001.E-02  4.9950E+02  2.8267E+07
220001.E-02  9.9900E+02  3.6901E+07
240001.E-02  0.0000E+00  4.2701E+07
260001.E-02  0.0000E+00  3.7816E+07
280001.E-02  4.9950E+02  4.6912E+07
300001.E-02  9.9900E+02  5.0285E+07
320001.E-02  4.9950E+02  4.2042E+07
340001.E-02  4.9950E+02  4.1431E+07
360001.E-02  0.0000E+00  4.1380E+07
380001.E-02  0.0000E+00  4.5155E+07
400001.E-02  0.0000E+00  3.9252E+07
420001.E-02  4.9950E+02  4.4775E+07
440001.E-02  0.0000E+00  4.2993E+07
460001.E-02  1.9980E+03  4.6706E+07
480001.E-02  1.9980E+03  4.6071E+07
500001.E-02  4.9950E+02  5.4223E+07
520001.E-02  1.9980E+03  5.6012E+07
540001.E-02  9.9900E+02  5.7032E+07
560001.E-02  9.9900E+02  6.1006E+07
580001.E-02  0.0000E+00  7.0491E+07
600001.E-02  9.9900E+02  6.8573E+07
620001.E-02  2.4975E+03  6.7927E+07
640001.E-02  1.4985E+03  6.5567E+07
660001.E-02  9.9900E+02  6.6643E+07
680001.E-02  1.4985E+03  6.8974E+07
700001.E-02  1.9980E+03  8.0379E+07
720001.E-02  2.4975E+03  7.1028E+07
740001.E-02  2.4975E+03  7.0857E+07
760001.E-02  1.9980E+03  8.4502E+07
780001.E-02  2.9970E+03  8.5792E+07
800001.E-02  4.4955E+03  7.9373E+07
820001.E-02  2.4975E+03  8.4762E+07
840001.E-02  1.4985E+03  7.7751E+07
860001.E-02  3.4965E+03  7.5106E+07
880001.E-02  4.4955E+03  8.6233E+07
900001.E-02  4.9950E+03  9.2749E+07
920001.E-02  5.4945E+03  9.9331E+07
940001.E-02  5.4945E+03  1.0075E+08
960001.E-02  1.0490E+04  1.0744E+08
980001.E-02  7.4925E+03  1.0146E+08
100000.E-01  8.4915E+03  9.7806E+07
102000.E-01  9.9900E+03  1.1362E+08
104000.E-01  6.9930E+03  1.1099E+08
106000.E-01  1.0490E+04  1.1444E+08
108000.E-01  1.5485E+04  1.1623E+08
110000.E-01  1.2987E+04  1.1681E+08
112000.E-01  1.5984E+04  1.0754E+08
114000.E-01  1.5485E+04  1.1318E+08
116000.E-01  1.5485E+04  1.1608E+08
118000.E-01  1.9980E+04  1.0290E+08
120000.E-01  1.9481E+04  1.0409E+08
122000.E-01  1.1988E+04  1.0433E+08
124000.E-01  1.7982E+04  9.8421E+07
126000.E-01  2.1479E+04  8.6483E+07
128000.E-01  2.1978E+04  8.4414E+07
130000.E-01  1.8981E+04  7.9003E+07
132000.E-01  1.6983E+04  8.2924E+07
134000.E-01  1.9980E+04  7.0979E+07
136000.E-01  1.7982E+04  6.1187E+07
138000.E-01  1.2987E+04  5.5383E+07
140000.E-01  2.0480E+04  5.5175E+07
142000.E-01  1.0989E+04  3.8838E+07
144000.E-01  1.0989E+04  3.4154E+07
146000.E-01  1.3986E+04  3.0154E+07
148000.E-01  9.4905E+03  2.3235E+07
150000.E-01  9.4905E+03  1.9336E+07
152000.E-01  7.4925E+03  1.5235E+07
154000.E-01  6.4935E+03  9.8936E+06
156000.E-01  5.4945E+03  5.6292E+06
158000.E-01  1.9980E+03  4.2113E+06
160000.E-01  2.9970E+03  3.1766E+06
162000.E-01  2.9970E+03  2.6507E+06
164000.E-01  1.4985E+03  1.5879E+06
166000.E-01  9.9900E+02  1.0210E+06
168000.E-01  0.0000E+00  2.3876E+05
170000.E-01  0.0000E+00  5.4945E+03
172000.E-01  0.0000E+00  1.5485E+04
174000.E-01  0.0000E+00  9.0909E+04
176000.E-01  0.0000E+00  2.4476E+04
178000.E-01  0.0000E+00  3.1968E+04
180000.E-01  0.0000E+00  1.7333E+05
182000.E-01  4.9950E+02  3.0170E+05
184000.E-01  0.0000E+00  1.5984E+04
186000.E-01  0.0000E+00  0.0000E+00
188000.E-01  0.0000E+00  0.0000E+00
190000.E-01  0.0000E+00  0.0000E+00
192000.E-01  0.0000E+00  0.0000E+00
194000.E-01  0.0000E+00  0.0000E+00
196000.E-01  0.0000E+00  0.0000E+00
198000.E-01  0.0000E+00  0.0000E+00
200000.E-01  0.0000E+00  0.0000E+00
